Polímeros y Materiales Avanzados: Física, Química y Teconología
Departamento
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Southeast University
Nankín, ChinaPublicaciones en colaboración con investigadoras/es de Southeast University (30)
2024
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Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses
Materials Science in Semiconductor Processing, Vol. 173
2023
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Etch and growth rates of GaN for surface orientations in the <0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton
Materials Science in Semiconductor Processing, Vol. 153
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Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input
Journal of Materials Research and Technology, Vol. 24, pp. 3363-3382
2022
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Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and Temperatures
Journal of Microelectromechanical Systems, Vol. 31, Núm. 2, pp. 249-264
2020
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Characterization of anisotropic wet etching of single-crystal sapphire
Sensors and Actuators, A: Physical, Vol. 303
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Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching
Microelectronic Engineering, Vol. 231
2019
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Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching
2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
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Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2018
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The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts
Journal of Microelectromechanical Systems, Vol. 27, Núm. 4, pp. 730-738
2017
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Evolutionary Kinetic Monte Carlo method for the simulation of anisotropic etching of Z-cut, at-cut and BT-cut quartz
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
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Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz
Sensors and Actuators, A: Physical, Vol. 256, pp. 24-34
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The level set simulation for complex microstructures in quartz wet etching
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
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Transient and Stable Profiles During Anisotropic Wet Etching of Quartz
Journal of Microelectromechanical Systems, Vol. 26, Núm. 5, pp. 1063-1072
2016
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Fluctuations during anisotropic etching: Local recalibration and application to si{110}
Journal of Microelectromechanical Systems, Vol. 25, Núm. 4, pp. 788-798
2015
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Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)
Journal of Micromechanics and Microengineering
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Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching
Journal of Micromechanics and Microengineering, Vol. 25, Núm. 5
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Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives
Sensors and Actuators, A: Physical, Vol. 233, pp. 451-459
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Simulation of microloading and ARDE in DRIE
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
2014
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Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners
Journal of Micromechanics and Microengineering, Vol. 24, Núm. 12
2013
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Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013