Evolutionary Kinetic Monte Carlo method for the simulation of anisotropic etching of Z-cut, at-cut and BT-cut quartz

  1. Zhang, H.
  2. Xing, Y.
  3. Zhang, J.
  4. Gosalvez, M.A.
  5. Li, Y.
  6. Zhang, Y.
Actas:
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ISBN: 9781538627310

Año de publicación: 2017

Páginas: 1308-1311

Tipo: Aportación congreso

DOI: 10.1109/TRANSDUCERS.2017.7994296 GOOGLE SCHOLAR
Fuente de los datos: Scopus