Publicaciones en colaboración con investigadoras/es de Southeast University (30)

2024

  1. Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses

    Materials Science in Semiconductor Processing, Vol. 173

2023

  1. Etch and growth rates of GaN for surface orientations in the <0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton

    Materials Science in Semiconductor Processing, Vol. 153

  2. Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input

    Journal of Materials Research and Technology, Vol. 24, pp. 3363-3382

2022

  1. Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and Temperatures

    Journal of Microelectromechanical Systems, Vol. 31, Núm. 2, pp. 249-264

2020

  1. Characterization of anisotropic wet etching of single-crystal sapphire

    Sensors and Actuators, A: Physical, Vol. 303

  2. Simulation-based optimization of out-of-plane, variable-height, convoluted quartz micro needle arrays via single-step anisotropic wet etching

    Microelectronic Engineering, Vol. 231

2019

  1. Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching

    2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

  2. Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

2018

  1. The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts

    Journal of Microelectromechanical Systems, Vol. 27, Núm. 4, pp. 730-738

2017

  1. Evolutionary Kinetic Monte Carlo method for the simulation of anisotropic etching of Z-cut, at-cut and BT-cut quartz

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

  2. Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz

    Sensors and Actuators, A: Physical, Vol. 256, pp. 24-34

  3. The level set simulation for complex microstructures in quartz wet etching

    TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

  4. Transient and Stable Profiles During Anisotropic Wet Etching of Quartz

    Journal of Microelectromechanical Systems, Vol. 26, Núm. 5, pp. 1063-1072

2016

  1. Fluctuations during anisotropic etching: Local recalibration and application to si{110}

    Journal of Microelectromechanical Systems, Vol. 25, Núm. 4, pp. 788-798

2015

  1. Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)

    Journal of Micromechanics and Microengineering

  2. Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

    Journal of Micromechanics and Microengineering, Vol. 25, Núm. 5

  3. Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives

    Sensors and Actuators, A: Physical, Vol. 233, pp. 451-459

  4. Simulation of microloading and ARDE in DRIE

    2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

2014

  1. Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners

    Journal of Micromechanics and Microengineering, Vol. 24, Núm. 12

2013

  1. Particle swarm optimization of model parameters: Simulation of deep reactive ion etching by the continuous cellular automaton

    2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013