Publicaciones en colaboración con investigadoras/es de Aalto University (34)

2020

  1. Modeling of silicon etching

    Handbook of Silicon Based MEMS Materials and Technologies (Elsevier), pp. 345-365

  2. Wet etching of silicon

    Handbook of Silicon Based MEMS Materials and Technologies (Elsevier), pp. 447-480

2015

  1. Modeling of Silicon Etching

    Handbook of Silicon Based MEMS Materials and Technologies: Second Edition (Elsevier Inc.), pp. 333-353

  2. Wet Etching of Silicon

    Handbook of Silicon Based MEMS Materials and Technologies: Second Edition (Elsevier Inc.), pp. 470-502

2010

  1. Octree-search Kinetic Monte Carlo

    Sensors and Actuators, A: Physical, Vol. 159, Núm. 1, pp. 64-68

2009

  1. Discrete and continuous cellular automata for the simulation of propagating surfaces

    Sensors and Actuators, A: Physical, Vol. 155, Núm. 1, pp. 98-112

  2. Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

    Sensors and Actuators, A: Physical, Vol. 154, Núm. 2, pp. 192-203

2008

  1. A continuous cellular automaton for the atomistic simulation of evolving surface in anisotropic etching

    Proceedings - 4th International Conference on Natural Computation, ICNC 2008

  2. Adsorption of metal impurities on H-terminated Si surfaces and their influence on the wet chemical etching of Si

    Journal of Physics Condensed Matter, Vol. 20, Núm. 48

  3. An improved anisotropic wet etching process for the fabrication of silicon MEMS structures using a single etching mask

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

  4. An improved anisotropic wet etching process for the fabrication of silicon MEMS structures using a single etching mask

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST

  5. Analytical solution of the continuous cellular automaton for anisotropic etching

    Journal of Microelectromechanical Systems, Vol. 17, Núm. 2, pp. 410-431

  6. Atomistic methods for the simulation of evolving surfaces

    Journal of Micromechanics and Microengineering, Vol. 18, Núm. 5

  7. Effect of Cu impurities on wet etching of Si(110): Formation of trapezoidal hillocks

    New Journal of Physics, Vol. 10

  8. Microstructures with rounded concave and sharp-edged convex corners in a single step wet anisotropic etching

    Proceedings of SPIE - The International Society for Optical Engineering

  9. Model for hydrogen bubbles and connection to roughness of etched surfaces

    Journal of Chemical Physics, Vol. 129, Núm. 15

  10. Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures

    Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

  11. Octree-search kinetic Monte Carlo algorithm for the simulation of complex 3D MEMS structures

    MEMS 2008: 21ST IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST

  12. VisualTAPAS: An example of density functional theory assisted understanding and simulation of anisotropic etching

    Journal of Physics Condensed Matter, Vol. 20, Núm. 6

2007

  1. An atomistic introduction to anisotropic etching

    Journal of Micromechanics and Microengineering