Publicaciones en colaboración con investigadoras/es de Centro de Física de Materiales (15)

2023

  1. Etch and growth rates of GaN for surface orientations in the <0001> crystallographic zone: Step flow and terrace erosion/filling via the Continuous Cellular Automaton

    Materials Science in Semiconductor Processing, Vol. 153

2020

  1. Dominant contributions to the apparent activation energy in two-dimensional submonolayer growth: Comparison between Cu/Ni(111) and Ni/Cu(111)

    Journal of Physics Condensed Matter, Vol. 32, Núm. 44

  2. Multiscale Analysis of Phase Transformations in Self-Assembled Layers of 4,4′-Biphenyl Dicarboxylic Acid on the Ag(001) Surface

    ACS Nano, Vol. 14, Núm. 6, pp. 7269-7279

2018

  1. The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts

    Journal of Microelectromechanical Systems, Vol. 27, Núm. 4, pp. 730-738

2017

  1. Microscopic Origin of the Apparent Activation Energy in Diffusion-Mediated Monolayer Growth of Two-Dimensional Materials

    Journal of Physical Chemistry C, Vol. 121, Núm. 37, pp. 20315-20322

  2. Transient and Stable Profiles During Anisotropic Wet Etching of Quartz

    Journal of Microelectromechanical Systems, Vol. 26, Núm. 5, pp. 1063-1072

2016

  1. Fluctuations during anisotropic etching: Local recalibration and application to si{110}

    Journal of Microelectromechanical Systems, Vol. 25, Núm. 4, pp. 788-798

2015

  1. Particle swarm optimization-based continuous cellular automaton for the simulation of deep reactive ion etching

    Journal of Micromechanics and Microengineering, Vol. 25, Núm. 5

  2. Removal probability function for Kinetic Monte Carlo simulations of anisotropic etching of silicon in alkaline etchants containing additives

    Sensors and Actuators, A: Physical, Vol. 233, pp. 451-459

  3. Simulation of microloading and ARDE in DRIE

    2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

2014

  1. Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners

    Journal of Micromechanics and Microengineering, Vol. 24, Núm. 12

  2. Complex chiral colloids and surfaces via high-index off-cut silicon

    Nano Letters, Vol. 14, Núm. 5, pp. 2934-2940

  3. Evolutionary Kinetic Monte Carlo: Atomistic rates of surface-mediated processes from surface morphologies

    Journal of Physical Chemistry C, Vol. 118, Núm. 22, pp. 11636-11648

2013

  1. Implementation and evaluation of the Level Set method: Towards efficient and accurate simulation of wet etching for microengineering applications

    Computer Physics Communications, Vol. 184, Núm. 10, pp. 2299-2309

  2. Level set implementation for the simulation of anisotropic etching: Application to complex MEMS micromachining

    Journal of Micromechanics and Microengineering, Vol. 23, Núm. 7