MIGUEL ANGEL
GOSALVEZ AYUSO
INVESTIGADOR/A DOCTOR/A PERMANENTE
Consejo Superior de Investigaciones Científicas
Madrid, EspañaPublications in collaboration with researchers from Consejo Superior de Investigaciones Científicas (1)
2016
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Evidence for faster etching at the mask-substrate interface: Atomistic simulation of complex cavities at the micron-/submicron-scale by the continuous cellular automaton
Journal of Micromechanics and Microengineering, Vol. 26, Núm. 4