A universal parameter for silicon anisotropic etching in alkaline solutions

  1. Cheng, D.
  2. Gosálvez, M.A.
  3. Shikida, M.
  4. Sato, K.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9780780394759

Year of publication: 2006

Volume: 2006

Pages: 318-321

Type: Conference paper

DOI: 10.1109/MEMSYS.2006.1627800 GOOGLE SCHOLAR
Data source: Scopus