Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations

  1. Cheng, D.
  2. Gosálvez, M.A.
  3. Hori, T.
  4. Sato, K.
  5. Shikida, M.
Journal:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Year of publication: 2006

Volume: 125

Issue: 2

Pages: 415-421

Type: Article

DOI: 10.1016/J.SNA.2005.08.022 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus