Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

  1. Pal, P.
  2. Sato, K.
  3. Shikida, M.
  4. Gosálvez, M.A.
Revue:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Année de publication: 2009

Volumen: 154

Número: 2

Pages: 192-203

Type: Article

DOI: 10.1016/J.SNA.2008.09.002 GOOGLE SCHOLAR
La source de données: Scopus