Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

  1. Pal, P.
  2. Sato, K.
  3. Shikida, M.
  4. Gosálvez, M.A.
Aldizkaria:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Argitalpen urtea: 2009

Alea: 154

Zenbakia: 2

Orrialdeak: 192-203

Mota: Artikulua

DOI: 10.1016/J.SNA.2008.09.002 GOOGLE SCHOLAR
Datuen iturria: Scopus