Study of corner compensating structures and fabrication of various shapes of MEMS structures in pure and surfactant added TMAH

  1. Pal, P.
  2. Sato, K.
  3. Shikida, M.
  4. Gosálvez, M.A.
Journal:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Year of publication: 2009

Volume: 154

Issue: 2

Pages: 192-203

Type: Article

DOI: 10.1016/J.SNA.2008.09.002 GOOGLE SCHOLAR
Data source: Scopus