Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps

  1. Agirregabiria, M.
  2. Blanco, F.J.
  3. Berganzo, J.
  4. Arroyo, M.T.
  5. Fullaondo, A.
  6. Mayora, K.
  7. Ruano-López, J.M.
Revue:
Lab on a Chip

ISSN: 1473-0189,  1473-0197

Année de publication: 2005

Volumen: 5

Número: 5

Pages: 545-552

Type: Article

DOI: 10.1039/B500519A GOOGLE SCHOLAR
La source de données: Scopus