Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps
- Agirregabiria, M.
- Blanco, F.J.
- Berganzo, J.
- Arroyo, M.T.
- Fullaondo, A.
- Mayora, K.
- Ruano-López, J.M.
ISSN: 1473-0189, 1473-0197
Year of publication: 2005
Volume: 5
Issue: 5
Pages: 545-552
Type: Article