Fabrication of SU-8 multilayer microstructures based on successive CMOS compatible adhesive bonding and releasing steps

  1. Agirregabiria, M.
  2. Blanco, F.J.
  3. Berganzo, J.
  4. Arroyo, M.T.
  5. Fullaondo, A.
  6. Mayora, K.
  7. Ruano-López, J.M.
Journal:
Lab on a Chip

ISSN: 1473-0189,  1473-0197

Year of publication: 2005

Volume: 5

Issue: 5

Pages: 545-552

Type: Article

DOI: 10.1039/B500519A GOOGLE SCHOLAR
Data source: Scopus