MIGUEL ANGEL
GOSALVEZ AYUSO
INVESTIGADOR/A DOCTOR/A PERMANENTE
IEEE Computer Society
Washington, Estados UnidosPublications en collaboration avec des chercheurs de IEEE Computer Society (1)
2006
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Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations
Sensors and Actuators, A: Physical, Vol. 125, Núm. 2, pp. 415-421