MIGUEL ANGEL
GOSALVEZ AYUSO
IKERTZAILE IRAUNKORRA
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IEEE Computer Society
Washington, Estados UnidosIEEE Computer Society-ko ikertzaileekin lankidetzan egindako argitalpenak (1)
2006
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Improvement in smoothness of anisotropically etched silicon surfaces: Effects of surfactant and TMAH concentrations
Sensors and Actuators, A: Physical, Vol. 125, Núm. 2, pp. 415-421