Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses
- Chen, Q.
- Gosalvez, M.A.
- Li, Q.
- Xing, Y.
- Zhou, Z.
Revue:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Année de publication: 2024
Volumen: 173
Type: Article