Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses
- Chen, Q.
- Gosalvez, M.A.
- Li, Q.
- Xing, Y.
- Zhou, Z.
Journal:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Year of publication: 2024
Volume: 173
Type: Article