Generalized damage profile function for subsurface damage in SiC induced by helium focused ion beam under line scanning at different energies and doses
- Chen, Q.
- Gosalvez, M.A.
- Li, Q.
- Xing, Y.
- Zhou, Z.
Zeitschrift:
Materials Science in Semiconductor Processing
ISSN: 1369-8001
Datum der Publikation: 2024
Ausgabe: 173
Art: Artikel