Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input
- Chen, Q.
- Gosalvez, M.A.
- Li, Q.
- Xing, Y.
Revue:
Journal of Materials Research and Technology
ISSN: 2238-7854
Année de publication: 2023
Volumen: 24
Pages: 3363-3382
Type: Article
