Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input

  1. Chen, Q.
  2. Gosalvez, M.A.
  3. Li, Q.
  4. Xing, Y.
Aldizkaria:
Journal of Materials Research and Technology

ISSN: 2238-7854

Argitalpen urtea: 2023

Alea: 24

Orrialdeak: 3363-3382

Mota: Artikulua

DOI: 10.1016/J.JMRT.2023.03.229 GOOGLE SCHOLAR lock_openSarbide irekia editor

Garapen Iraunkorreko Helburuak

Datuen iturria: Scopus