Helium focused ion beam induced subsurface damage on Si and SiC substrates: experiments and generative deep neural network modeling via position-dependent input

1. Chen, Q.
2. Gosalvez, M.A.
3. Li, Q.
4. Xing, Y.

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DOI: 10.1016/J.JMRT.2023.03.229 GOOGLE SCHOLAR lock_openOpen access editor

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