Ultrathin metallic membranes to be used in tunable RFMEMS volume capacitors

  1. Etxeberria, JA
  2. Sancho, A
  3. de la Fuente, P
  4. Cabezon, X
Book Series:
2005 IEEE SENSORS, VOLS 1 AND 2

ISSN: 1930-0395

ISBN: 0-7803-9056-3

Year of publication: 2005

Pages: 448-451

Congress: 4th IEEE Conference on Sensors

Type: Conference paper

GOOGLE SCHOLAR
Data source: WoS