EVOLUTIONARY KINETIC MONTE CARLO METHOD FOR THE SIMULATION OF ANISOTROPIC ETCHING OF Z-CUT, AT-CUT AND BT-CUT QUARTZ

  1. Zhang, Hui
  2. Xing, Yan
  3. Zhang, Jin
  4. Gosalvez, Miguel A.
  5. Li, Yuan
  6. Zhang, Yunze
Libro:
2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)

ISBN: 978-1-5386-2732-7

Año de publicación: 2017

Páginas: 1308-1311

Congreso: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Tipo: Aportación congreso