EVOLUTIONARY KINETIC MONTE CARLO METHOD FOR THE SIMULATION OF ANISOTROPIC ETCHING OF Z-CUT, AT-CUT AND BT-CUT QUARTZ
- Zhang, Hui
- Xing, Yan
- Zhang, Jin
- Gosalvez, Miguel A.
- Li, Yuan
- Zhang, Yunze
ISBN: 978-1-5386-2732-7
Year of publication: 2017
Pages: 1308-1311
Congress: 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Type: Conference paper