LEVEL SET SIMULATION OF SURFACE EVOLUTION IN ANISOTROPIC WET ETCHING OF PATTERNED SAPPHIRE SUBTRATE

  1. Zhang, Jie
  2. Xing, Yan
  3. Gosalvez, Miguel A.
  4. Qiu, Xiaoli
  5. Lin, Xiaohui
  6. Zhang, Chibin
Liburu bilduma:
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

ISSN: 1084-6999

ISBN: 978-1-7281-1610-5

Argitalpen urtea: 2019

Orrialdeak: 361-364

Biltzarra: 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)

Mota: Biltzar ekarpena

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Datuen iturria: WoS