LEVEL SET SIMULATION OF SURFACE EVOLUTION IN ANISOTROPIC WET ETCHING OF PATTERNED SAPPHIRE SUBTRATE

  1. Zhang, Jie
  2. Xing, Yan
  3. Gosalvez, Miguel A.
  4. Qiu, Xiaoli
  5. Lin, Xiaohui
  6. Zhang, Chibin
Book Series:
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

ISSN: 1084-6999

ISBN: 978-1-7281-1610-5

Year of publication: 2019

Pages: 361-364

Congress: 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)

Type: Conference paper

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Data source: WoS