LEVEL SET SIMULATION OF SURFACE EVOLUTION IN ANISOTROPIC WET ETCHING OF PATTERNED SAPPHIRE SUBTRATE

  1. Zhang, Jie
  2. Xing, Yan
  3. Gosalvez, Miguel A.
  4. Qiu, Xiaoli
  5. Lin, Xiaohui
  6. Zhang, Chibin
Büchersammlung:
2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)

ISSN: 1084-6999

ISBN: 978-1-7281-1610-5

Datum der Publikation: 2019

Seiten: 361-364

Kongress: 32nd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS)

Art: Konferenz-Beitrag

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Fuente de los datos: WoS