Anisotropic etching of silicon as a tool for creating injection molding tooling surfaces

  1. Werkmeister, J.
  2. Gosalvez, M.A.
  3. Willoughby, P.
  4. Slocum, A.H.
  5. Sato, K.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2006

Volume: 15

Issue: 6

Pages: 1671-1680

Type: Article

DOI: 10.1109/JMEMS.2006.885989 GOOGLE SCHOLAR
Data source: Scopus