Surfactant adsorption on single-crystal silicon surfaces in tmah solution: Orientation-dependent adsorption detected by in situ infrared spectroscopy

  1. Pal, P.
  2. Sato, K.
  3. Gosalvez, M.A.
  4. Kimura, Y.
  5. Ishibashi, K.-I.
  6. Niwano, M.
  7. Hida, H.
  8. Tang, B.
  9. Itoh, S.
Aldizkaria:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Argitalpen urtea: 2009

Alea: 18

Zenbakia: 6

Orrialdeak: 1345-1356

Mota: Artikulua

DOI: 10.1109/JMEMS.2009.2031688 GOOGLE SCHOLAR