Surfactant adsorption on single-crystal silicon surfaces in tmah solution: Orientation-dependent adsorption detected by in situ infrared spectroscopy

  1. Pal, P.
  2. Sato, K.
  3. Gosalvez, M.A.
  4. Kimura, Y.
  5. Ishibashi, K.-I.
  6. Niwano, M.
  7. Hida, H.
  8. Tang, B.
  9. Itoh, S.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2009

Volume: 18

Issue: 6

Pages: 1345-1356

Type: Article

DOI: 10.1109/JMEMS.2009.2031688 GOOGLE SCHOLAR