Surfactant adsorption on single-crystal silicon surfaces in tmah solution: Orientation-dependent adsorption detected by in situ infrared spectroscopy
- Pal, P.
- Sato, K.
- Gosalvez, M.A.
- Kimura, Y.
- Ishibashi, K.-I.
- Niwano, M.
- Hida, H.
- Tang, B.
- Itoh, S.
ISSN: 1057-7157
Year of publication: 2009
Volume: 18
Issue: 6
Pages: 1345-1356
Type: Article