Embedded purification for electron beam induced Pt deposition using MeCpPtMe3
- Villamor, E.
- Casanova, F.
- Trompenaars, P.H.F.
- Mulders, J.J.L.
ISSN: 1361-6528, 0957-4484
Year of publication: 2015
Volume: 26
Issue: 9
Type: Article
ISSN: 1361-6528, 0957-4484
Year of publication: 2015
Volume: 26
Issue: 9
Type: Article