Embedded purification for electron beam induced Pt deposition using MeCpPtMe3

  1. Villamor, E.
  2. Casanova, F.
  3. Trompenaars, P.H.F.
  4. Mulders, J.J.L.
Journal:
Nanotechnology

ISSN: 1361-6528 0957-4484

Year of publication: 2015

Volume: 26

Issue: 9

Type: Article

DOI: 10.1088/0957-4484/26/9/095303 GOOGLE SCHOLAR