Nanoimprint lithography and surface modification as prospective technologies for heterogeneous integration

  1. Kehagias, N.
  2. Hu, W.
  3. Reboud, V.
  4. Lu, N.
  5. Dong, B.
  6. Chi, L.
  7. Fuchs, H.
  8. Genua, A.
  9. Alduncín, J.A.
  10. Pomposo, J.A.
  11. Mecerreyes, D.
  12. Torres, C.M.S.
Revue:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351

Année de publication: 2008

Volumen: 5

Número: 12

Pages: 3571-3575

Type: Communication dans un congrès

DOI: 10.1002/PSSC.200780226 GOOGLE SCHOLAR
La source de données: Scopus