Nanoimprint lithography and surface modification as prospective technologies for heterogeneous integration

  1. Kehagias, N.
  2. Hu, W.
  3. Reboud, V.
  4. Lu, N.
  5. Dong, B.
  6. Chi, L.
  7. Fuchs, H.
  8. Genua, A.
  9. Alduncín, J.A.
  10. Pomposo, J.A.
  11. Mecerreyes, D.
  12. Torres, C.M.S.
Journal:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351

Year of publication: 2008

Volume: 5

Issue: 12

Pages: 3571-3575

Type: Conference paper

DOI: 10.1002/PSSC.200780226 GOOGLE SCHOLAR
Data source: Scopus