Nanoimprint lithography and surface modification as prospective technologies for heterogeneous integration

  1. Kehagias, N.
  2. Hu, W.
  3. Reboud, V.
  4. Lu, N.
  5. Dong, B.
  6. Chi, L.
  7. Fuchs, H.
  8. Genua, A.
  9. Alduncín, J.A.
  10. Pomposo, J.A.
  11. Mecerreyes, D.
  12. Torres, C.M.S.
Aldizkaria:
Physica Status Solidi (C) Current Topics in Solid State Physics

ISSN: 1862-6351

Argitalpen urtea: 2008

Alea: 5

Zenbakia: 12

Orrialdeak: 3571-3575

Mota: Biltzar ekarpena

DOI: 10.1002/PSSC.200780226 GOOGLE SCHOLAR
Datuen iturria: Scopus