Langmuir probe and optical emission spectroscopy studies for RF magnetron sputtering during TiON thin film deposition
- Metawa, A.E.
- El-Hossary, F.M.
- Raaif, M.
- SalahEl-Deen, M.
- El-Moula, A.A.A.
Revue:
Chinese Journal of Physics
ISSN: 0577-9073
Année de publication: 2020
Volumen: 68
Pages: 168-177
Type: Article