Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate

  1. Zhang, J.
  2. Xing, Y.
  3. Gosalvez, M.A.
  4. Qiu, X.
  5. Lin, X.
  6. Zhang, C.
Actes de conférence:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781728116105

Année de publication: 2019

Volumen: 2019-January

Pages: 361-364

Type: Communication dans un congrès

DOI: 10.1109/MEMSYS.2019.8870817 GOOGLE SCHOLAR
La source de données: Scopus