Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate

  1. Zhang, J.
  2. Xing, Y.
  3. Gosalvez, M.A.
  4. Qiu, X.
  5. Lin, X.
  6. Zhang, C.
Aktak:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781728116105

Argitalpen urtea: 2019

Alea: 2019-January

Orrialdeak: 361-364

Mota: Biltzar ekarpena

DOI: 10.1109/MEMSYS.2019.8870817 GOOGLE SCHOLAR
Datuen iturria: Scopus