Level Set Simulation of Surface Evolution in Anisotropic Wet Etching of Patterned Sapphire Subtrate

  1. Zhang, J.
  2. Xing, Y.
  3. Gosalvez, M.A.
  4. Qiu, X.
  5. Lin, X.
  6. Zhang, C.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781728116105

Year of publication: 2019

Volume: 2019-January

Pages: 361-364

Type: Conference paper

DOI: 10.1109/MEMSYS.2019.8870817 GOOGLE SCHOLAR
Data source: Scopus