The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts

  1. Xing, Y.
  2. Zhang, J.
  3. Gosalvez, M.A.
  4. Zhang, H.
  5. Li, Y.
  6. Zhou, S.
Aldizkaria:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Argitalpen urtea: 2018

Alea: 27

Zenbakia: 4

Orrialdeak: 730-738

Mota: Artikulua

DOI: 10.1109/JMEMS.2018.2850442 GOOGLE SCHOLAR