The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts
- Xing, Y.
- Zhang, J.
- Gosalvez, M.A.
- Zhang, H.
- Li, Y.
- Zhou, S.
ISSN: 1057-7157
Year of publication: 2018
Volume: 27
Issue: 4
Pages: 730-738
Type: Article