The Maximum Positive Curvature Recognition Method to Determine Etch Profiles in Wet Etching of Quartz on at and BT Cuts

  1. Xing, Y.
  2. Zhang, J.
  3. Gosalvez, M.A.
  4. Zhang, H.
  5. Li, Y.
  6. Zhou, S.
Journal:
Journal of Microelectromechanical Systems

ISSN: 1057-7157

Year of publication: 2018

Volume: 27

Issue: 4

Pages: 730-738

Type: Article

DOI: 10.1109/JMEMS.2018.2850442 GOOGLE SCHOLAR