Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz
- Zhang, H.
- Xing, Y.
- Li, Y.
- Gosálvez, M.A.
- Qiu, X.
Revue:
Sensors and Actuators, A: Physical
ISSN: 0924-4247
Année de publication: 2017
Volumen: 256
Pages: 24-34
Type: Article
