Kinetic Monte Carlo method for the simulation of anisotropic wet etching of quartz

  1. Zhang, H.
  2. Xing, Y.
  3. Li, Y.
  4. Gosálvez, M.A.
  5. Qiu, X.
Journal:
Sensors and Actuators, A: Physical

ISSN: 0924-4247

Year of publication: 2017

Volume: 256

Pages: 24-34

Type: Article

DOI: 10.1016/J.SNA.2017.01.008 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus