Integrated SMA-based NEMS actuator for optical switching
- Lambrecht, F.
- Aseguinolaza, I.
- Chernenko, V.
- Kohl, M.
ISSN: 1084-6999
ISBN: 9781509019731
Année de publication: 2016
Volumen: 2016-February
Pages: 79-82
Type: Communication dans un congrès
Actes de conférence:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)