Integrated SMA-based NEMS actuator for optical switching

  1. Lambrecht, F.
  2. Aseguinolaza, I.
  3. Chernenko, V.
  4. Kohl, M.
Aktak:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781509019731

Argitalpen urtea: 2016

Alea: 2016-February

Orrialdeak: 79-82

Mota: Biltzar ekarpena

DOI: 10.1109/MEMSYS.2016.7421562 GOOGLE SCHOLAR
Datuen iturria: Scopus