Integrated SMA-based NEMS actuator for optical switching

  1. Lambrecht, F.
  2. Aseguinolaza, I.
  3. Chernenko, V.
  4. Kohl, M.
Proceedings:
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ISSN: 1084-6999

ISBN: 9781509019731

Year of publication: 2016

Volume: 2016-February

Pages: 79-82

Type: Conference paper

DOI: 10.1109/MEMSYS.2016.7421562 GOOGLE SCHOLAR
Data source: Scopus