Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)
- Pal, P.
- Gosalvez, M.A.
- Sato, K.
- Hida, H.
- Xing, Y.
ISSN: 1361-6439, 0960-1317
Argitalpen urtea: 2015
Alea: 25
Zenbakia: 4
Mota: Hutsen zuzenketa