Erratum: Anisotropic etching on Si{1 1 0}: Experiment and simulation for the formation of microstructures with convex corners (Journal of Micromechanics and Microengineering)

1. Pal, P.
2. Gosalvez, M.A.
3. Sato, K.
4. Hida, H.
5. Xing, Y.