Evolutionary determination of kinetic Monte Carlo rates for the simulation of evolving surfaces in anisotropic etching of silicon

  1. Xing, Y.
  2. Gosálvez, M.A.
  3. Sato, K.
  4. Tian, M.
  5. Yi, H.
Journal:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Year of publication: 2012

Volume: 22

Issue: 8

Type: Article

DOI: 10.1088/0960-1317/22/8/085020 GOOGLE SCHOLAR

Sustainable development goals

Data source: Scopus