Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

  1. Ferrando, N.
  2. Gosálvez, M.A.
  3. Cerdá, J.
  4. Gadea, R.
  5. Sato, K.
Revue:
Journal of Micromechanics and Microengineering

ISSN: 0960-1317,  1361-6439

Année de publication: 2011

Volumen: 21

Número: 2

Type: Article

DOI: 10.1088/0960-1317/21/2/025021 GOOGLE SCHOLAR

Objectifs de Développement Durable

La source de données: Scopus